Vacuum Automation
Industrial robot armMagnaTran vacuum robots and Marathon vacuum system platforms providing substrate transport within controlled vacuum semiconductor manufacturing environments.
hardwareManufacturer
Pricing envelope
—UndisclosedUnclaimed profile
Brooks Automation
Unclaimed · generated from public sourcesbrooks.com·Chelmsford, Massachusetts, US·founded 1978·2000+ employees·updated 2026-08-25·revision 1
Not reviewed by Brooks AutomationThis profile was generated from public sources. Every value carries the URL, retrieval date and exact quote it came from. Claim this profile →
Provides automation and contamination control solutions for semiconductor and life science manufacturing, including vacuum robotics, wafer-handling systems, and reticle management.
Offerings
8 listed#vacuum-automation
Advanced Packaging
substrate handlingMarathon LEAP AX EFEM and Marathon LEAP SX sorter platforms with Vision LEAP substrate mapping and dynamic pick, for wafer, panel, and film-based substrates in advanced packaging production.
hardwareManufacturer
Pricing envelope
—UndisclosedContamination Control
contamination controlPuroMaxx carrier cleaning, PuroVision/PuroMetric/PuroSense inspection, and PuroView fleet-management software for FOUP and reticle-pod contamination control in semiconductor fabs.
hardwareManufacturer
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—UndisclosedReticle Management & Lithography
reticle managementGuardianPro reticle storage platforms and PuroMaxx reticle handling systems providing environmental protection, automated handling, and tracking for lithography reticles.
hardwareManufacturer
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—UndisclosedInterface Automation
interface automationVision LEAP and SMIF/VersaPort load ports, EUV reticle loadports, and AutoID RFID asset tracking for material handling and identification at the wafer-fab tool interface.
hardwareManufacturer
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—UndisclosedLaboratory Automation
Laboratory automation systemPreciseFlex robots and benchtop-to-high-throughput automation platforms for sample handling, tube sorting/decapping/sealing, and instrument loading in clinical and life-science laboratories.
hardwareManufacturer
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—Undisclosedapplicationsmaterial_handling
inferred
“Support automated sample handling and instrument loading and unloading in laboratory environments”https://www.brooks.com/solutions/laboratory-automation/retrieved 2026-08-25 · inferred
Industrial Automation
Collaborative robot armPreciseFlex collaborative robots with embedded vision and servo grippers for in-circuit, functional, and burn-in test loading and PCBA handling in electronics manufacturing.
hardwareManufacturer
Pricing envelope
—Undisclosedapplicationsinspection · material_handling
inferred
“In-Circuit Testing (ICT) - Fast, repeatable loading; PCBA Handling - Safe, repeatable handling for a wide range of applications”https://www.preciseflexrobots.com/electronics/retrieved 2026-08-25 · inferred
Service
Support, training, or maintenance servicePathway service program covering installation, certified repair, upgrades, health checks, and lifecycle planning for Brooks systems, delivered across North America, Europe, and Asia.
service
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—UndisclosedProof
CertificationsISO 9001
src
“The Brooks quality management system is based upon and compliant with the ISO 9001 international standard.”https://www.brooks.com/about/corporate-social-responsibility/product-responsibility/quality-assurance-certifications/retrieved 2026-08-25 · extracted
“ISO 9001:2015 - Certificate of Registration, Chelmsford, MA, USA”https://www.brooks.com/getmedia/520e8f56-fb02-47e3-8d5a-93917237fb92/Certificate_ISO_9001_2015_Chelmsford_MA_USA.pdfretrieved 2026-08-25 · extracted
Who it is for
Industriessemiconductor manufacturing, life sciences
RegionsWorldwide