ZEUS Co., Ltd. supplies wet process systems, thermal process equipment, logistics systems and centralized control software for the semiconductor and display industries, and manufactures industrial robots.
Single and batch wafer cleaning equipment for semiconductor front-end (clean, etch, strip) and post-process (flux, etch, debond) steps; models include ION12, APOLLON, VENUS, BW Series, ATOM.
Rapid thermal processing (RTP) system for leading-edge memory and logic device processes.
Heat treatment equipment for the post-coating step of TFT/CF display processes, compatible with glass generations 2G to 11G.
6-axis articulated industrial robot designed for use in confined spaces.
SCARA (horizontal articulated) robot designed to minimize belt use.
Delta (parallel) robot with a robot body weight of 17 kg.
Wafer handling robot for vacuum environments, listed in the ATM Robot (Display) line.
High-purity chemicals, gas analyzers (FTIR, NDIR), vacuum components (gauges, RGA) and wafer cleaning analysis services for semiconductor, display and MEMS production.