Vacuum Robotic Arms
wafer_handling_robot#vacuum-robotic-armsRobotic arms (HA-3.2, HA-5.0) transferring substrates up to 300mm within high-vacuum environments; central handling robot for the Constellation Systems platform.
componentmanufacturer
Pricing envelope
—Undisclosedmodel quotePrice filters return this as unknown, with a caveat. No published price list; engagement is via quote request.inferred
repeatability_mm±0.05 mmsrc
integration_requiredrequiredinferred
channelsdirect, distributors
protocolsrs232 · ethernetsrc
A value missing from this list is unknown, not a no. applicationsmaterial_handlingA value missing from this list is unknown, not a no.
Certifications
ceCE markingself-declaredsrc
semi_s2semi_s2self-declaredsrc
Atmospheric Robots
scara#atmospheric-robotsSCARA-type robots (Hatm-4.0, Hatm-5.0) handling SEMI standard wafers, reticles, and masks in atmospheric front ends; payload up to 0.5kg, MCBF exceeding 10 million cycles.
componentmanufacturer
Pricing envelope
—Undisclosedmodel quotePrice filters return this as unknown, with a caveat. No published price list; engagement is via quote request.inferred
payload_kgup to 0.5 kgsrc
repeatability_mm±0.1 mmsrc
integration_requiredrequired
channelsdirect, distributors
protocolsrs232 · ethernetsrc
A value missing from this list is unknown, not a no. applicationsmaterial_handlingA value missing from this list is unknown, not a no.
Vacuum Load Lock Systems
load_lock_system#vacuum-load-locksAutomated single-substrate vacuum load lock chambers (SL-200, SL-300, SL-450) eliminating the need to vent and evacuate OEM process chambers each cycle; payload 2.2-5.4kg.
componentmanufacturer
Pricing envelope
—Undisclosedmodel quotePrice filters return this as unknown, with a caveat. No published price list; engagement is via quote request.inferred
repeatability_mm±0.12 mmsrc
integration_requiredrequired
channelsdirect, distributors
protocolsrs232 · ethernet · devicenetsrc
A value missing from this list is unknown, not a no. applicationsmaterial_handlingA value missing from this list is unknown, not a no.
EFEM Systems
efem_system#efem-systemsDLP-300 equipment front end module transporting wafers and photomasks between ultra-clean carriers and process tools; supports up to two load ports and two load locks, throughput over 60 wafers/hour.
hardwaremanufacturer
Pricing envelope
—Undisclosedmodel quotePrice filters return this as unknown, with a caveat. No published price list; engagement is via quote request.inferred
integration_requiredrequired
channelsdirect, distributors
applicationsmaterial_handlingA value missing from this list is unknown, not a no.
Vacuum Aligners
wafer_aligner#vacuum-alignersHigh-vacuum substrate aligners (HA-71, HA-75, HA-75C/HA-76) providing fiducial and centering alignment for opaque and transparent wafers up to 300mm.
componentmanufacturer
Pricing envelope
—Undisclosedmodel quotePrice filters return this as unknown, with a caveat. No published price list; engagement is via quote request.inferred
repeatability_mm±0.1 mmsrc
integration_requiredrequired
channelsdirect, distributors
protocolsrs232 · ethernetsrc
A value missing from this list is unknown, not a no. Certifications
ceCE markingself-declaredsrc
semi_s2semi_s2self-declaredsrc
Vacuum Elevators
wafer_elevator#vacuum-elevatorsVacuum random-access elevators (HA-50V, HA-51V) providing precise substrate vertical indexing in high-vacuum environments; payload up to 34kg.
componentmanufacturer
Pricing envelope
—Undisclosedmodel quotePrice filters return this as unknown, with a caveat. No published price list; engagement is via quote request.inferred
repeatability_mm±0.05 mmsrc
integration_requiredrequired
channelsdirect, distributors
protocolsrs232 · ethernetsrc
A value missing from this list is unknown, not a no. applicationsmaterial_handlingA value missing from this list is unknown, not a no.
Certifications
ceCE markingself-declaredsrc
semi_s2semi_s2self-declaredsrc
Cassette Load Ports
cassette_load_port#cassette-load-portsVacuum and atmospheric cassette load ports (CLP, MLP) for the Constellation cluster-system family, handling single wafers up to 50-wafer cassettes up to 200mm (300mm variants available).
componentmanufacturer
Pricing envelope
—Undisclosedmodel quotePrice filters return this as unknown, with a caveat. No published price list; engagement is via quote request.inferred
integration_requiredrequired
channelsdirect, distributors
protocolsrs232 · ethernetsrc
A value missing from this list is unknown, not a no. applicationsmaterial_handlingA value missing from this list is unknown, not a no.
Custom Design, Contract Manufacturing & Repair Services
integration_service#custom-design-and-repair-servicesCustom mechanical, electrical, and software design, contract manufacturing, and rebuild/repair/robotic-replacement services for Hine and legacy Hine Design/Asyst wafer-handling equipment.
servicemanufacturer
Pricing envelope
—Undisclosedmodel quotePrice filters return this as unknown, with a caveat. No published price list; engagement is via quote request.inferred
warranty_months3–12 monthssrc
channelsdirect
applicationsmaterial_handlingA value missing from this list is unknown, not a no.
Terms note90-day warranty on targeted repairs; 1-year warranty on comprehensive rebuilds.