Tool Automation
industrial_robotAtmospheric and vacuum wafer-transfer robots, load ports, and prealigners for semiconductor process tools, handling wafers up to 300 mm.
Develops and manufactures atmospheric and vacuum wafer-transfer robots, EFEMs, wafer sorters, motion-control systems, and related software and services for semiconductor, flat panel display, data storage, solar, and LED equipment manufacturers.
Atmospheric and vacuum wafer-transfer robots, load ports, and prealigners for semiconductor process tools, handling wafers up to 300 mm.
EFEMs, wafer sorters, and substrate stockers for semiconductor processing tools; the Mini-Max EFEM is rated Class 1 and the CODEX stocker handles 150-300 mm substrates.
GIFT integration framework and GB Toolbox software for programming, diagnostics, maintenance, and calibration of Genmark robots, and for building custom equipment-automation applications.
Custom motion-control technology for multi-axis synchronization, continuous-path control, and wafer/FPD planarity detection in semiconductor and flat-panel-display handling equipment.
Custom automation-solution design, system optimization, and automated-teaching development delivered by Nidec Genmark's engineering team for semiconductor equipment manufacturers.
Contract design, prototyping, assembly, and manufacture-planning services for OEMs, including bill-of-materials review, first-article review, and remote firmware support.
Teach-pendant terminals and Autoteach calibration software for operator control of Genmark robots, reducing tool calibration time from hours to minutes.
Tiered service and maintenance program (Essential, Professional, Enterprise) for Genmark wafer-handling robots, supporting 40,000+ installed systems worldwide with 48-hour spare-parts delivery.