Development, design, manufacturing, and sales of automation systems for semiconductor and flat-panel display (FPD) production, including wafer and mask/reticle handling systems, life-science automation equipment, motion controllers, and related software.
Robots and modules for wafer transfer in semiconductor fabs, spanning atmospheric robots, vacuum wafer robots, aligners, load ports, vacuum platforms, EFEM/sorters, and stockers.
Handling systems for photomasks and reticles used in semiconductor and FPD lithography, including the RSR160 model.
Automation equipment for cell culture and sample handling, including CellKeeper, CO2 incubators (SCALE48/SCALE120), CellFarm(L), CellShot, Varistock, Power Seal, and tube handling systems.
Software for automation equipment, comprising system integration service, package service, EDA/Interface A solution, equipment control solution, and host online communication solution.
Controllers and stepping motors with drivers used in automation equipment.