ULVAC develops, manufactures and sells vacuum equipment and related components, materials and analytical instruments for industries including semiconductors, displays, electronics, automotive, pharmaceuticals and food.
Vacuum process equipment for semiconductor production from R&D to mass production, including the ENTRON-EXX platform, and for advanced packaging, power devices, MEMS and optical devices.
Sputtering systems (Model: SMD) for OLED display panel production and vacuum deposition equipment for EV battery manufacturing, including copper deposition for anode current collectors.
Vacuum heat treatment furnaces, lyophilizers for pharmaceutical applications, and leak testers.
Screw, multi-stage roots, scroll, diaphragm and rocking piston dry vacuum pumps, oil rotary vacuum pumps and mechanical booster pumps for the 1×10^5 Pa to 1×10^-1 Pa range.
Tracer-gas (helium and hydrogen) leak detectors, including the stand-alone HELIOT900 series and the HELIOT MONO integration type, plus calibrated leaks and sniffer units.
Robots for wafer and substrate transport in vacuum environments, used in semiconductor manufacturing, coating systems and analytical instruments. Models: COVOT and ELEC-RZ.
Sputtering targets for semiconductors, targets for high-definition masks, and heat-resistant materials produced using powder metallurgy.
Surface analysis instruments based on Auger Electron Spectroscopy (AES), X-ray Photoelectron Spectroscopy (XPS) and Secondary Ion Mass Spectrometry (SIMS), supplied through ULVAC-PHI.