Hine Automation
hineautomation.com#atmospheric-robotsWafer and substrate handling robot
Atmospheric RobotsSCARA-type substrate handling robots for atmospheric front ends, with integrated controller and 3-axis motion. Models Hatm-4.0 and Hatm-5.0 carry payloads up to 0.5 kg.
✓ category = wafer_handling_robot✓ serves DE
#vacuum-robotic-armsWafer and substrate handling robot
Vacuum Robotic ArmsVacuum wafer-handling robot arms (HA-3.2, HA-5.0) for wafers up to 300 mm, used as the central handling robot in Constellation Systems. Payload is 2.5 kg standard or 4.5 kg high-load.
✓ category = wafer_handling_robot✓ serves DE
Persimmon Technologies
persimmontech.com#vacuum-roboticsWafer and substrate handling robot
Vacuum RoboticsDirect drive vacuum robots for wafer and panel handling in semiconductor, power electronics, LED, FPD and packaging equipment, in dual, quad, side-by-side and single SCARA configurations.
✓ category = wafer_handling_robot✓ serves DE
#semiconductor-robotsWafer and substrate handling robot
Semiconductor robotsWafer transfer robot series for 2- to 12-inch wafers, atmospheric and vacuum models, for heat treatment, cleaning, etching, thin film, lithography, thinning, bonding.
✓ category = wafer_handling_robot✓ serves DE
Brooks Automation
brooks.com#magnatran-vacuum-robotsWafer and substrate handling robot
MagnaTran Vacuum RobotsVacuum substrate-transfer robots for semiconductor vacuum processing, including MagnaTran high-temperature robots and Leap vacuum robot platforms.
✓ category = wafer_handling_robotserves unknown · included
#clean-transfer-robotWafer and substrate handling robot
Clean Transfer RobotACTRANS wafer transfer robots for vacuum and atmospheric environments, handling wafers up to 300 mm; the line also includes wafer aligners and FPD transfer robots.
✓ category = wafer_handling_robotserves unknown · included
Global ZEUS
globalzeus.com#sr99-seriesWafer and substrate handling robot
SR99 Series Wafer Handling RobotWafer handling robot for vacuum environments, listed in the ATM Robot (Display) line.
✓ category = wafer_handling_robotserves unknown · included
HD Hyundai Robotics
hd-hyundairobotics.com#fpd-robotWafer and substrate handling robot
FPD RobotRobots for handling within flat panel display (FPD) processes and for transferring materials between process stages.
✓ category = wafer_handling_robotserves unknown · included
HIRATA Corporation
hirata.co.jp#wafer-transfer-robotsWafer and substrate handling robot
Wafer Transfer RobotsAtmospheric and vacuum wafer transfer robots for 300 mm wafers in low- and high-vacuum environments, plus robots for FOPLP.
✓ category = wafer_handling_robotserves unknown · included
#semiconductor-robotsWafer and substrate handling robot
Semiconductor robotsWafer transfer robots for front-end semiconductor device processes and wafer production plants. Atmospheric, vacuum, and waterproof environments; single- or twin-arm.
✓ category = wafer_handling_robotserves unknown · included
#glass-substrate-handling-robotsWafer and substrate handling robot
Glass substrate transfer robotsSubstrate transfer robots for front-end processes of liquid crystal (organic EL) etc. and glass substrate plants. Atmospheric/vacuum environments; single or twin arm.
✓ category = wafer_handling_robotserves unknown · included
Kensington Laboratories
kensingtonlabs.com#wafer-handling-robotsWafer and substrate handling robot
Wafer Handling RobotsAtmospheric MultiLink SCARA wafer robot systems and WFH robot systems for semiconductor wafer and substrate handling, with pre-aligners and end-effectors.
✓ category = wafer_handling_robotserves unknown · included
#wafer-transfer-robotsWafer and substrate handling robot
Wafer transfer robotsWafer transfer robots (main units), listed within Nidec's factory automation equipment category.
✓ category = wafer_handling_robotserves unknown · included
Robots and Design
rnd.re.kr#semiconductor-robotsWafer and substrate handling robot
Semiconductor RobotsRobots that transfer semiconductor wafers, LCD/FPD glass, reticles/masks and FOUPs. Types include standard WTR, flip, telescopic, SCARA, Cartesian, wet, variable-pitch and vacuum robots.
✓ category = wafer_handling_robotserves unknown · included
#atmospheric-robotWafer and substrate handling robot
Atmospheric RobotAtmospheric wafer handling robots within RORZE's Wafer Handling System line, offered as models RR756L15, RR757L15 and RR759L27.
✓ category = wafer_handling_robotserves unknown · included
#vacuum-wafer-robotWafer and substrate handling robot
Vacuum Wafer RobotVacuum wafer handling robots within RORZE's Wafer Handling System line, offered in the RR481, RR491, RR492 and RR493 model series.
✓ category = wafer_handling_robotserves unknown · included
#wafer-transfer-robotsWafer and substrate handling robot
Wafer Transfer RobotsSemiconductor wafer handling products: EFEM, Blade D and Blade S atmospheric robot hands, Loadport, SMIF, Aligner, and Mini STK.
✓ category = wafer_handling_robotserves unknown · included
Soft Robot Tech (SRT)
softrobottech.com#wafer-handling-roboticsWafer and substrate handling robot
Wafer Handling Robotics (RB100 Series)RB100 Series robots for transferring wafers in semiconductor front-end equipment.
✓ category = wafer_handling_robotserves unknown · included
#clean-transfer-equipmentWafer and substrate handling robot
Clean Transfer EquipmentAtmospheric wafer transfer robots (ET-PLP, MTE, MTSR, TT301A series), pre-aligners (MAF-R, MAF-S series) and vacuum robots (MTP series) for semiconductor equipment and EFEMs.
✓ category = wafer_handling_robotserves unknown · included
#vacuum-transfer-robotWafer and substrate handling robot
Vacuum Transfer RobotRobots for wafer and substrate transport in vacuum environments, used in semiconductor manufacturing, coating systems and analytical instruments. Models: COVOT and ELEC-RZ.
✓ category = wafer_handling_robotserves unknown · included