Load ports, EUV reticle load ports, SMIF and Versaport interfaces, and Auto ID systems for semiconductor tools. Install base of more than 10,000 300 mm load ports.
Equipment front end modules (DLP-300) that transport silicon wafers or quartz photomasks between storage carriers and processing, measurement and test systems. Throughput is above 60 wafers per hour.
Equipment Front End Module and sorter placed in front of wafer and panel process equipment, offered in 300 mm configurations with 4-port, 2x2-port and 2-port options.
FOUP openers (300 mm KWF series and FOPLP variants) and 200 mm SMIF pod openers (KWO, KWY and KWP series).
Configurable EFEM in 2, 3 and 4 FOUP-wide sizes, used with Kensington robots, pre-aligners and FOUP load ports; includes a BOLTS interface.
Wafer loader/unloader module for front-end semiconductor tools. It handles different wafer sizes and supports SECS/GEM host communication.
Mini-Max EFEM minienvironment systems, SortMax+ wafer sorters and CODEX substrate stockers, including customized EFEM and stocker equipment.
Equipment front end modules for semiconductor equipment, listed with load port modules (LPM), pre-aligners and controllers for moving wafers.
Wafer-handling modules: pre-aligners, SMIF units for 150–200mm wafer pods, FOUP openers and cassette loaders.
Equipment front end modules in 2-, 3- and 4-port models (RE-2P, RE-3P, RE-4P) for 300mm FOUPs, with a cleanroom robot, FFU, load ports and aligner.
Wafer load ports within RORZE's Wafer Handling System line, offered as RV201-F07 variants.
Equipment front end modules and wafer sorters within RORZE's Wafer Handling System line, offered as ACE EFEM and ACE SORTER.
Load ports and EFEMs for semiconductor wafer handling, including 300mm FOUP, 300/200mm auto switch, 200mm SMIF, panel FOUP and tape frame FOUP load ports, and 300mm EFEM and N2 EFEM.
LP160 Series load ports, dedicated loading units for semiconductor front-end equipment. The listed models are LP160F, LP160FP, LP160S, LP160C and LP160F-01.